Taganrog: TTI YuFU, 2010. - 72 s. In this manual, promising methods for the formation of structures of elements of nanoelectronics and nanosystem technology are considered. In the first section of the manual, an overview of modern lithographic methods is presented, alternative methods of nanolithography based on the use of a scanning probe microscope are considered, structures of nanoelectronic devices are described. The second section presents the results of the analysis of the mechanisms of local anode oxidation of metal, presents a mathematical model for calculating the conditions and modes of formation of nanostructures by the LAO method based on thin films of metals. The textbook can be used by students when studying courses "Zonde technologies of nanoelectronics" , "Technological processes of micro- and nanoelectronics" , "Materials and Methods of Nanotechnology" , as well as in the conduct of advanced professional training and retraining of specialists , focused on investment projects of GC "RUSNANOTECH" in the field of design and production of SBIS with topological norms of 90 nm .