The methodological collection is developed in accordance with the state educational standards of higher professional education in the direction of training of a graduate specialist 654100 - "Electronics and Microelectronics" (specialty 200400 - "Industrial Electronics") and the direction of training of a bachelor 550700 - "Electronics and Microelectronics" . The collection contains a work program, a thematic plan of lectures, a list of basic and additional literature, a task for coursework and methodological instructions for its implementation. The work program covers the basics of film and semiconductor microelectronics; manufacturing features of IMS, BIS, SBIS, microassembly, issues of development and design of various types of IMS, the basics of functional microelectronics . Guidelines for the implementation of coursework are designed to assist students and contain methods for calculating thin-film elements , guidelines and recommendations for the development of topology and manufacturing technology IMS , as well as the necessary background data for the work. The main technological methods and cycles of manufacture of thin-film IMS are considered