Powerful ion beam and its industrial application

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Literary translation . High intensity pulsed ion beam sources and their industrial applications. Elseiver. Surface and Coatings Technology 114(1999) 206-212This paper presents a study on the industrial application of powerful ion beams (MIP) performed at the Institute of Nuclear Physics of Tomsk Polytechnic University (NPI TPU) and the Scientific Industrial Enterprise ‘Linetron’, H. -Novgorod . The most interesting results were obtained for: $ modification of the surface of the MIP tool, to increase its wear resistance; $ deposition of thin metal, composite and diamond-like carbon films; $ short-pulse implantation of semiconductors. It is shown that ion beams with low energy density (106109 W/cm2), have prospects in industrial application. The article presents a brief description of the interaction of the MIP-solid body and the main parameters of the MIP used in the study and their impact on the properties of the treated samples.
LF/932159663/R
Data sheet
- Name of the Author
- Isakov I.F.
Matvienko V.M.
Opekounov M.S.
Remnev G.E.
Ryzhkov V.A.
et al. - Language
- Russian