Training Manual . - Tomsk: Tomsk Polytechnic University, 2011. - 136 s. The manual provides an overview of the main types of thin-film coatings applied using low-temperature plasma in vacuum. The role of thin-film coatings in technological processes and the importance of the task of developing new coatings with improved characteristics. The value is formulated and methods of preliminary cleaning of the surface are described before applying thin films on it. The physical, mechanical and chemical properties of coatings that differ in chemical composition and application areas, as well as the main methods of measuring and controlling the parameters of coatings . are considered. It is intended for bachelors studying in the direction of 011200 "Physics" and masters of physics studying in the following programs: "Plasma Physics", "Pulse and Plasma Technologies", "Hydrogen Energy" .