Chemical processing and photolithography in the production of semiconductor devices and chips
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The book deals with the technological processes of chemical processing, photolithography and manufacturing of photo templates in the production of semiconductor devices and integrated circuits. The foundations of the theory of these processes, methods and means of quality control of processing, technological operations and equipment. are given.
LF/788053423/R
Data sheet
- Name of the Author
- Мокеев О.К.
Романов А.С. - Language
- Russian
- Release date
- 1979
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The book deals with the technological processes of chemical processing, photolithography and manufacturing of photo templates in the production of semiconductor...