Cathodoluminescence of semiconductors in narrow electron beams in a scanning electron microscope
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The processes of interaction of the electron probe of the raster electron microscope with semiconductor and dielectric objects and the occurrence of light radiation - catodoluminescence are considered. The possibilities and informativeness of the methodology in the analysis of a solid body are discussed
LF/605636698/R
Data sheet
- Name of the Author
- Петров В.И.
- Language
- Russian
- Release date
- 1997
11 books by the same author:
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The processes of interaction of the electron probe of the raster electron microscope with semiconductor and dielectric objects and the occurrence of light radia...