Практикум по химии и технологии полупроводников
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The workshop describes laboratory work on chemistry and semiconductor technology . The manual is intended for studying the main methods of physicochemical research of condensed systems (DTA, Tensimetric methods, built by RTX-diagrams, methods of microstructural analysis and microhardness) , Different from , Methods of synthesis, crystallization purification and cultivation of semiconducting compounds , and also introduces the main technological operations in the production of semiconductor devices (oxidation, diffusion, Epitaxy, etching).
LF/10255517/R
Data sheet
- Name of the Author
- Анохин В.З.
и др. - Language
- Russian
- Release date
- 1978
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The workshop describes laboratory work on chemistry and semiconductor technology . The manual is intended for studying the main methods of physicochemical resea...