Workshop on Semiconductor Chemistry and Technology

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The workshop describes laboratory work on chemistry and semiconductor technology . The manual is intended for studying the main methods of physicochemical research of condensed systems (DTA, Tensimetric methods, built P-T-X-diagrams , methods of microstructural analysis and microhardness) , Different from , Methods of synthesis, crystallization purification and cultivation of semiconducting compounds , and also introduces the main technological operations in the production of semiconductor devices (oxidation, diffusion, Epitaxy, etching). In each work, a theoretical introduction is given, diagrams of devices and equipment, methods of quantitative processing of experimental results are given.
LF/246865966/R
Data sheet
- Name of the Author
- Анохин В.З.
Гончаров Е.Г.
Угай Я.А. (ред.) - Language
- Russian
- Release date
- 1978