Thin Film Processes II
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This book gives a clear, practical exposition of important thin film deposition and etching processes that have not yet been adequately reviewed. It discusses selected processes in tutorial overviews with implementation guide lines and an introduction to the literature.
LF/814269/R
Data sheet
- Name of the Author
- John L.
Kern
Vossen
Werner(eds.) - Language
- English
- ISBN
- 9780127282510
- Release date
- 1991
