Mn. : BSU, 2003. — 171 s. : il. — ISBN 985-445-950-0 . The monograph systematizes the physical methods of studying the structure, phase composition, electrophysical properties of materials and multilayer thin-film structures used in microelectronics to create SBIS, as well as functional control of chips .. The results on the use of various control methods at various stages of development of electronic equipment products are presented and their place in the technological chain of creation of SBIS. is shown. Designed for scientific and engineering workers engaged in the development of technology for creating SBIS with submicron dimensions, as well as for teachers, students and postgraduates of universities of physical, physical, chemical and technological specialties .