Training Manual . Tomsk: Tomsk State University of Control Systems and Radioelectronics, 2007. - 110 s. This manual describes the basic laws of the processes of interaction of electrons and ions with a solid body , Here are the main methods of obtaining electron and ion fluxes , as well as variants of formation and control of beams of charged particles , Development of sources of electrons and ions , The sources of ions of gases and solids are considered separately ,. in particular metal ions. Possible variants of classifications of equipment, electronic guns and ion sources according to the nature of the processes taken as a basis for their design. are given.