Ultra Clean Processing of Semiconductor Surfaces XI
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This extensively revised comprehensive textbook, covering a wide range of topics in systems engineering, is suitable for courses at the graduate and undergraduate levels, each with a different emphasis. There is more than enough material to cover two semesters of an undergraduate course, as well as a one semester graduate course. The pedagogy provides enough flexibility for an instructor to teach the topics in systems engineering she or he would like. This book is sufficiently broad-based for undergraduate and graduate programs in various branches of engineering and management.
LF/665074/R
Характеристики
- ФИО Автора
- Heyns
Marc
Mertens
Meuris
Paul - Язык
- Английский
- ISBN
- 9783037855270
- Дата выхода
- 2013
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