Methods and instruments for analyzing electronic components at micro- and nanoscale
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The proposed textbook aims to familiarize students with the basics of the most popular methods of electronic and ion spectroscopy , widely used for material analysis, Structures and Components of Electronic Engineering in Micro and Nanoscale The manual describes the methods of electronic and ion spectroscopy for surface analysis, features of their implementation for the study of semiconductor materials and components of electronic equipment , and features of preparation of samples for analysis. The manual also provides some information about the device spectrometers and their components.
LF/94662195/R
Data sheet
- Name of the Author
- Collective of authors
- Language
- Russian
- Release date
- 2011
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The proposed textbook aims to familiarize students with the basics of the most popular methods of electronic and ion spectroscopy , widely used for material ana...