Processes of micro- and nanotechnologies: method. guide to the course of lectures
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This textbook is intended for students of the Faculty of Physics and Mathematics, areas of training: 210600 Nanotechnology; 210100 Electronics and nanoelectronics . Recommended as an additional material to the course of lectures on the discipline Processes of micro and nanotechnology. The study of this discipline is aimed at familiarizing with the range of current tasks of modern electronics. The publication discusses the main methods of forming the topology of microelectronics elements and applying metal contacts
LF/85283591/R
Data sheet
- Name of the Author
- Гадиев Р.М.
- Language
- Russian
- Release date
- 2012
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This textbook is intended for students of the Faculty of Physics and Mathematics, areas of training: 210600 Nanotechnology; 210100 Electronics and nanoelectroni...