Plasma coatings (methods and equipment): training manual
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An overview of modern methods of obtaining coatings using low-temperature plasma. The main methods of coating currently used are being systematized, methods of plasma-assisted chemical gas-phase and physical gas-phase deposition are being considered . The main types of vacuum process plants for coating with plasma methods are presented separately.
LF/550852070/R
Data sheet
- Name of the Author
- Кривобоков В.П.
Соловьёв А.А.
Сочугов Н.С. - Language
- Russian
- ISBN
- 9785982981912
- Release date
- 2011
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An overview of modern methods of obtaining coatings using low-temperature plasma. The main methods of coating currently used are being systematized, methods of ...