Photolithographic technologies in the production of optical parts : a training manual
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The basics of photolithography, types and methods of manufacturing optical scales. Optical details that require the formation of topology on the surface. The manual is intended for students studying in the direction of "Optotechnology", graduate students and researchers interested in photolithographic technologies .
LF/426051831/R
Data sheet
- Name of the Author
- В. А.
Дерябин - Language
- Russian
- ISBN
- 9785799611101
- Release date
- 2014
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The basics of photolithography, types and methods of manufacturing optical scales. Optical details that require the formation of topology on the surface. The ma...