Vacuum Microelectronics
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What are the origins and features of the new scientific direction in physical electronics? Why is autoelectronic emission so important in VMEs? How to make devices and components, having micron geometric dimensions (with nanometric tolerances for these dimensions)? Why do you need VME? Answers to the questions posed and gives this article
LF/166293633/R
Data sheet
- Name of the Author
- Трубецков Д.И.
- Language
- Russian
- Release date
- 1997
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What are the origins and features of the new scientific direction in physical electronics? Why is autoelectronic emission so important in VMEs? How to make devi...