Inclined ion implantation: Workshop for the special course ''Modeling in microelectronics''
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Workshop on the special course "Modeling in microelectronics" was prepared at the Department of Physics of Microelectronics of Voronezh State University . It is recommended for students of the 4th and 5th courses of the Faculty of Physics of the specialty "Microelectronics and semiconductor devices", as well as students of the 6th year studying in the master's program "Physics" (program "Physics of semiconductors .) Microelectronics')
LF/573250786/R
Data sheet
- Name of the Author
- Бормонтов Е.Н.
Быкадорова Г.В.
Григорьев Р.Г.
Науч.
Петров Б.К.
ред. - Language
- Russian
- Release date
- 2003
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Workshop on the special course "Modeling in microelectronics" was prepared at the Department of Physics of Microelectronics of Voronezh State University . It is...