The results of experimental studies and computer modeling of the scattering of low-energy metal ions by the surface of metals are presented . Based on the obtained data, the lower limit (by energy (speed)) of the applicability of the model of paired elastic collisions of an incoming ion with separate unrelated atoms of the crystal lattice is established. The validity of the mechanism of multiparticle ion interaction simultaneously with a group of atoms (cluster) of the target surface. The practical use of low-energy scattering of ions by the surface of a solid is discussed with respect to nanostructures. The book can be useful for students of physical specialties of universities and researchers engaged in the study of the interaction of atomic particles with the surface.